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Design and Fabrication of Microelectromechanical Devices

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Design and Fabrication of Microelectromechanical Devices

6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points.

Tags: Before 1300: Ancient and Medieval HistoryInforInformation environmentsInformation TheoryNutrition
Details: http://ocw.mit.edu/courses/e...chanical-devices-spring-2007
Categories: Computer Sciences
Starts : 2007-02-01

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