Design and Fabrication of Microelectromechanical Devices 
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6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points. Categories:
Computer Sciences
Starts :
2007-02-01 |
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AlternativesIf you know any alternatives, please let us know. PrerequisitesIf you can suggest any prerequisite, please let us know. Certification Exams-- there are no exams to get certification after this course --If your company does certification for those who completed this course then register your company as certification vendor and add your exams to the Exams Directory. | ||
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